| 摘要 |
PROBLEM TO BE SOLVED: To achieve stable attraction holding while preventing breakage of an electrostatic attraction function section due to biting of a foreign matter. SOLUTION: An electrostatic chuck for a vacuum lamination apparatus is provided with an electrode 1a having two or more poles and a dielectric layer 1b for covering the electrode, and is used for allowing the dielectric layer to contact a glass substrate B in a vacuum to attraction-hold the glass substrate B. In the electrostatic chuck, the thickness T of the dielectric layer is set at 50-200μm. Further, the electrode has a two-pole interdigital structure and the width L of the interdigital electrodes is set at 0.5-1.5 mm, or the interval S between the interdigital electrodes is set at 0.5-1.5 mm. COPYRIGHT: (C)2008,JPO&INPIT |
