发明名称 CLAMPING DEVICE AND OBJECT LOADING METHOD
摘要 <p>The present invention relates to a c lamping device configured to clamp an object (20, 120) on a support (1, 101). The clamping device comprises: a first device configured to force the object and the support away from each other using a first force, and a second device configured to force the object and the support towards each other using a second force. The first device and second device are configured to simultaneously exert the first force and the second force respectively to shape the object to a desired shape before completing the clamping of the object on the support.</p>
申请公布号 WO2008156366(A1) 申请公布日期 2008.12.24
申请号 WO2008NL50407 申请日期 2008.06.20
申请人 ASML NETHERLANDS B.V.;COMPEN, RENE THEODORUS PETRUS;JACOBS, JOHANNES HENRICUS WILHELMUS;LEENDERS, MARTINUS HENDRIKUS ANTONIUS;OTTENS, JOOST JEROEN;SMEETS, MARTIN FRANS PIERRE 发明人 COMPEN, RENE THEODORUS PETRUS;JACOBS, JOHANNES HENRICUS WILHELMUS;LEENDERS, MARTINUS HENDRIKUS ANTONIUS;OTTENS, JOOST JEROEN;SMEETS, MARTIN FRANS PIERRE
分类号 G03F7/20 主分类号 G03F7/20
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