| 摘要 |
The invention relates to a method and a device for transferring micro- or nanostructures onto a substrate by contact stamping. The stamp is composed of a stamp receptacle and a lower stamp part, which are removably joined together. This permits both a rapid change of different lower stamp parts with different micro- or nanostructures and permits mechanical stress of the structure membranes to be avoided. The material to be printed is transferred from the source to the substrate by the wetting of the structure membrane with the substances to be transferred and by subsequently bringing the substrate into contact with an initial contact region located centrally on the structure membrane which grows concentrically towards the exterior. This achieves a reproducible transfer of substances. The convex deformation of the structure membrane is achieved by an excess pressure in the chamber formed by the stamp receptacle and the structure membrane, a gas or a liquid being supplied to the chamber via the media connection. If the structure membrane is permeable, the chamber has a reservoir function for the material to be transferred, said material diffusing through the structure membrane. Micro- or nano-arrays with different fine structures can be created on the substrate surface by a positioning mechanism comprising a marking system. |
