MANUFACTURING METHOD OF PERPENDICULAR MAGNETIC RECORDING MEDIUM, AND PERPENDICULAR MAGNETIC RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a perpendicular magnetic recording medium which has a stable magnetic characteristic during mass-production by providing a method for selectively evaluating the film thickness and magnetic characteristic of a specific magnetic layer and feeding an evaluation result obtained by using the method back to a film formation process. SOLUTION: The manufacturing method comprises: a process for forming a medium by forming a soft magnetic layer, a first ferromagnetic layer containing oxide, a second ferromagnetic layer, and a protective layer on a non-conductive substrate (104); a first evaluation process for sampling the medium and evaluating a magnetic characteristic by Kerr effect measurement (108); and a second evaluation process for evaluating the medium by Hall effect measurement and selectively evaluating the film thickness and magnetic characteristic of the second ferromagnetic layer when the magnetic characteristic is outside the range of a target value in the first evaluation process (112), feeds the evaluation result of the second evaluation process back to the medium formation process (104) and controls a film formation condition of the second ferromagnetic layer so as to bring the magnetic characteristic of the medium within the range of specifications. COPYRIGHT: (C)2009,JPO&INPIT