| 摘要 |
PROBLEM TO BE SOLVED: To reduce time for alignment while maintaining the alignment accuracy of a detected surface when the partial shape of each partial area of the detected surface is measured.SOLUTION: A rotary stage 704 is controlled at two measurement positions along a rotational direction moved when the wavefront of each reflected light of a plurality of partial areas is detected by a detection part 9 to move a detected surface 12a. From the wavefront detected by the detection part 9 in the controlled state of the rotary stage 704 to the two measurement positions, actual arrangement errors with respect to the track of the detected surface 12a at the two measurement positions are measured. Based on the measured actual arrangement errors, for remaining measurement positions among a plurality of measurement positions, each arrangement error with respect to the track of the detected surface 12a is estimated. The rotary stage 704 is controlled to the measurement positions before the measurement of each partial shape data, and stages 701 to 703 are controlled to positions canceling the arrangement errors at the measurement positions to align the detected surface 12a.SELECTED DRAWING: Figure 1 |
