MEASUREMENT MICROSCOPE DEVICE, MEASUREMENT METHOD USING THE SAME, OPERATION PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To facilitate comparative measurement for comparing an object.SOLUTION: A measurement microscope device comprises: profile line arrangement means for setting a profile line as respective measurement references at an arbitrary position on a comparison reference image and a comparison object image; alignment means for moving or rotating the comparison object image so that the comparison object image takes the same posture as the comparison reference image; line interlock switching means capable of automatically arranging the same profile line as the profile line arranged on one of the comparison reference image or the comparison object image by the profile line arrangement means at a corresponding position of the other of the comparison reference image or the comparison object image; and measurement means for performing comparison measurement to the comparison reference image and the comparison object image in a state where a profile graph showing a cross-sectional shape following the profile line arranged on each height image corresponding to the comparison reference image or the comparison object image is respectively obtained from the corresponding height images and displayed on display means.SELECTED DRAWING: Figure 1