| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate capable of improving a yield, by reducing the defective ratio in processing of using existing equipment, without using a large-scale device and a highly accurate surface plate, by restraining a defect of a substrate surface causable as a killer defect, in processing of the substrate, particularly, a synthetic quartz glass substrate.SOLUTION: A manufacturing method of a substrate includes a process of polishing-processing the substrate, by holding the substrate 6 in a work hole 7 formed in a carrier 5 provided on a lower surface plate 3, and landing an upper surface plate 2 on a substrate surface while rotating the lower surface plate in a state of coating a shock absorbing liquid on the substrate surface, and then, rotating the upper-lower surface plates while accompanying polishing slurry on the substrate surface.SELECTED DRAWING: Figure 1 |
