| 摘要 |
<P>PROBLEM TO BE SOLVED: To appropriately separate a plurality of detection signals after amplifying the detection signals in one amplifying circuit. <P>SOLUTION: This angular velocity sensor detects axial direction displacements of a weight in the respective axial directions, by an x-axis detection circuit, a y-axis detection circuit and a z-axis detection circuit respectively. A carrier wave with a phase shifted by 90° from that of a carrier wave of the z-axis detection circuit is applied to the x-axis detection circuit and the y-axis detection circuit, wherein the carrier wave is applied switchedly to the x-axis detection circuit and the y-axis detection circuit, based on a clock signals. Outputs from the respective axis detection circuits are collectively input into a current/voltage conversion circuit. Output signals therefrom is input into three synchronous detection circuits, and an x-axis detection signal component, a y-axis detection signal component and a z-axis detection signal component are separated in the respective synchronous detection circuits. The z-axis detection signal component is separated from the other axis detection signal components, in the synchronous detection circuits, by applying phase division processing to the combined signal, and further the x-axis detection signal component is separated from the y-axis detection signal component, by applying time division processing, based on switching timing of the carrier wave. <P>COPYRIGHT: (C)2007,JPO&INPIT |
