发明名称 SMART PARALLEL CONTROLLER FOR SEMICONDUCTOR EXPERIMENTS
摘要 <p>An instrument coordinates execution of a plurality of expenments employing a plurality of source measurement units (SMU's) to characterize a plurality of devices under test (DUT's) Each of a plurality of expepment controllers manages one experiment by, at least in part, controlling the SMU's allocated to that experiment A main controller interoperates with a host to manage the expepment controllers For example, the instrument may provide expenment parameters to the SMU's ppor to execution of the experiments The main controller may receive expepment parameters from a host controller external to the instrument At least in part based on the received expepment parameters, the mam controller may configure which expepment controllers are to manage which expenment The main controller may also cause each expepment controller to provide approppate ones of the received expepment parameters to the SMU's allocated to the expepment which that expenment controller is configured to manage.</p>
申请公布号 WO2008156937(A1) 申请公布日期 2008.12.24
申请号 WO2008US63760 申请日期 2008.05.15
申请人 QUALITAU, INC.;DANIEL, SHAY-TSION 发明人 DANIEL, SHAY-TSION
分类号 G01R31/26 主分类号 G01R31/26
代理机构 代理人
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