发明名称 PATTERN FORMING METHOD, PATTERN FORMING DEVICE, METHOD FOR MANUFACTURING RECORDING MEDIUM, AND METHOD FOR MANUFACTURING MEMBER
摘要 The method involves generating a photo-sensitive unit on a surface of a substrate i.e. glass substrate, and gathering ultra-short pulse laser. The pulse laser is radiated on the substrate by positioning a point of focus of the laser with a boundary surface between the substrate and the photo-sensitive unit. The pulse laser is radiated to a limiting surface by transmitting the pulse laser through the substrate. The photo-sensitive unit reacting with the pulse laser or the photo-sensitive unit not reacting with the pulse laser are selectively removed. Independent claims are also included for the following: (1) a process for manufacturing a recording medium (2) a method for manufacturing a patterned unit.
申请公布号 KR100876945(B1) 申请公布日期 2009.01.07
申请号 KR20070090946 申请日期 2007.09.07
申请人 发明人
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
代理机构 代理人
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