| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray diffraction device excellent in angle resolving power, reduced in the lowering of X-ray intensity and simplified in its structure in an X-ray diffraction method using a parallel beam method, and the X-ray diffraction method. SOLUTION: A sample 26 is irradiated with parallel beam X-rays 24 and the diffracted X-rays 28 from the sample 26 are reflected by a mirror 18 to be detected by an X-ray detector 20. The shape of the reflecting surface of the mirror 18 is an equiangular spiral having the center on the surface of the sample 26. A crystal lattice surface contributing to reflection is parallel to the reflecting surface at the arbitrary point on the reflecting surface. The X-ray detector 20 is a unidimensional position response type within the plane parallel to a diffraction plane. Then, the relative positional relation between the mirror 18 and the X-ray detector 20 is determined so that the reflected X-rays from a plurality of the different points on the reflecting surface of the mirror 18 respectively arrive at a plurality of the different points of the X-ray detector 20. COPYRIGHT: (C)2009,JPO&INPIT
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