| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology for vapor-depositing an organic thin film, which enhances the efficiency of use of a vapor deposition material and can prevent the vapor deposition material from degrading with times. SOLUTION: This vapor-emitting device has a shower plate type emitting portion 11 in which a plurality of emission ports 12 are arrayed in a plane, and a supply pipe 14 which is provided in the emitting portion 11 and supplies the vapor 50 of an organic vapor deposition material to the emitting portion 11. The supply pipe 14 has a body portion 14a which has been formed into a pipe shape, and is constituted so as to spray the vapor 50 of the organic vapor deposition material to the bottom part 11a of the emitting portion 11 from a spray port 15 provided on the body portion 14a. COPYRIGHT: (C)2009,JPO&INPIT
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