INSPECTION DEVICE, INSPECTION METHOD, AND PROGRAM FOR INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an inspection device that inspects a defect of an inspection object with high accuracy regardless of reflection light on the surface of the inspection object.SOLUTION: An inspection device acquires a first image obtained by photographing one face of a sheet-like inspection object P illuminated by first illuminating means (20) (S7), acquires a second image obtained by photographing one face of the inspection object P illuminated by second illuminating means (30) that illuminates the inspection object P from the other face side with light in a predetermined color and illuminated by the first illuminating means (S6), creates a difference image between the first image and the second image (S8), and inspects the inspection object P on the basis of the difference image (S9).SELECTED DRAWING: Figure 5