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发明名称
Verfahren zur Herstellung eines zweidimensionalen Detektorarrays zur Detektion elektromagnetischer Strahlung
摘要
申请公布号
DE10054680(B4)
申请公布日期
2007.04.19
申请号
DE20001054680
申请日期
2000.11.03
申请人
SIEMENS AG
发明人
OTTO, WALTER
分类号
G01T1/20;G01T1/29;G01N;G01N23/08;G01T1/24;H01L27/14
主分类号
G01T1/20
代理机构
代理人
主权项
地址
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