发明名称 Akustische Oberflächenwellenanordnung und Verfahren zu ihrer Herstellung
摘要 A method of producing a surface acoustic wave device includes the steps of forming a first electrode film (2) for constituting an interdigital electrode (5), a wiring electrode (6), and an electrode pad (7) on the piezoelectric substrate (1), forming an insulation film (3) on the piezoelectric substrate (1) so as to cover the first electrode film (2), patterning the insulation film (3) so that the insulation film existing on the portion of the first electrode film (2) onto which a second electrode film (4) is to be laminated is removed, forming the second electrode film (4) on the portion of the first electrode film (2) from which the insulation film (3) has been removed, and bonding a bump (8) onto the second electrode film (4). <IMAGE>
申请公布号 DE602004019265(D1) 申请公布日期 2009.03.19
申请号 DE20046019265T 申请日期 2004.10.01
申请人 MURATA MFG. CO. LTD. 发明人 YAMAMOTO, SHUJI
分类号 H03H3/08;H03H9/02;H03H9/145;H03H9/15;H03H9/25 主分类号 H03H3/08
代理机构 代理人
主权项
地址