| 摘要 |
PROBLEM TO BE SOLVED: To inhibit a part opposed to a pressure chamber adjacent to a pressure chamber from being deformed when a part corresponding to the latter pressure chamber is deformed in a piezoelectric layer and a diaphragm. SOLUTION: A lower member 61 formed of a piezoelectric material is joined to a top surface of the piezoelectric layer 44. The lower member 61 has each part opposite to a partition 26 made a first joint 71. The width Wa of the first joint 71 is made narrower than the width Wb of the partition 26. An upper member 62 formed of the piezoelectric material is arranged on a top surface of the lower member 61. The first joints 71 are connected with each other as top surfaces of the first joints 71 are joined to the bottom surface of the upper member 62. The piezoelectric layers 41-44, the lower member 61 and the upper member 62 are joined to each other when green sheets of the piezoelectric material composing these are layered and baked. COPYRIGHT: (C)2009,JPO&INPIT
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