发明名称 |
SENSOR INTEGRATED METAL DIELECTRIC FILTERS FOR SOLAR-BLIND SILICON ULTRAVIOLET DETECTORS |
摘要 |
A filter for electromagnetic radiation including one or more dielectric spacer regions and one or more reflective regions integrated on a semiconductor substrate, the semiconductor substrate including a semiconductor photodetector, such that the filter transmits ultraviolet radiation to the semiconductor photodetector, the ultraviolet radiation having a range of wavelengths, and the filter suppresses transmission of electromagnetic radiation, having wavelengths outside the range of wavelengths, to the semiconductor photodetector. |
申请公布号 |
WO2016130582(A1) |
申请公布日期 |
2016.08.18 |
申请号 |
WO2016US17200 |
申请日期 |
2016.02.09 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
HOENK, Michael, E.;HENNESSY, John, J.;NIKZAD, Shouleh;JEWELL, April, D. |
分类号 |
G02B5/20;H01L31/0216;H01L31/09 |
主分类号 |
G02B5/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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