| 摘要 |
PROBLEM TO BE SOLVED: To provide a collet having excellent pickup resistance, capable of suppressing occurrence of takeout; and to provide a method of its application, and a manufacturing method of an optical semiconductor device using the collet.SOLUTION: In a collet 6, which is a collet 6 sucking and moving an encapsulation semiconductor element 3, and including a suction part 7 having an opening part 8 and an abutment part 9 for enclosing the opening part 8, the area ratio of the opening part 8 to the encapsulation semiconductor element 3 is 8% or higher and 88% or lower, and Shore A of the abutment part 9 is 65 or more and less than 95.SELECTED DRAWING: Figure 1 |
