| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device in which positional deviation of a board and a board holding part can be reduced, and to provide a board transport device, an imprint method and a manufacturing method for article.SOLUTION: An imprint device for patterning an imprint material by bringing the imprint material on a board and a mold into contact and then releasing the mold, in a state where the board is sucked with different suction forces at a plurality of partial regions, has a board holding unit including the plurality of partial regions, and an acquisition unit for acquiring the measurement data indicating the positional deviation of the board for the board holding unit, and positioning the patterning substrate for the board holding unit, by using the measurement data thus acquired.SELECTED DRAWING: Figure 1 |
