| 摘要 |
A valve for sealing a gas feedthrough is provided herein. In some embodiments, a valve for sealing off a gas feedthrough includes a valve body having an upper portion and a lower portion, wherein the upper portion includes a central opening, and wherein the lower portion includes an inner volume; a coupling member disposed within the inner volume and having a central conduit, wherein the inner volume is defined by an upper surface of the coupling member and an upper wall and sidewalls of the lower portion; a sealing member having a shaft extending through the central opening and a flange extending radially outward from the shaft, wherein the flange includes an upper surface which opposes the upper wall of the lower portion; and a biasing element disposed between the sealing member and coupling member to bias the sealing member against the upper wall. |
