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发明名称
摘要
申请公布号	JP3859226(B2)	申请公布日期	2006.12.20
申请号	JP20040154897	申请日期	2004.05.25
申请人		发明人
分类号	C23C16/44;H01L21/683;C23C16/455;C23C16/458;C23C16/46;C23C16/48;C23C16/54;C30B25/02;C30B25/10;C30B25/12;C30B25/14;C30B31/12;C30B31/14;F27B5/04;F27B5/14;F27B5/16;F27B5/18;F27D11/00;F27D11/02;H01L21/00;H01L21/205;H01L21/22;H01L21/26;H01L21/324;H01L21/687;H05B3/00	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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