| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fine coaxial wire that effectively reduces noise as a conduction wiring between electrodes of a fine semiconductor device while having a high characteristic impedance, its manufacturing method, and a semiconductor device using the fine coaxial wire. <P>SOLUTION: The fine coaxial wire is composed of a conductive wire made of a metal conductor, an insulating layer covering the peripheral face of the conductive wire, and a metal conductor layer covering the outer peripheral face of the insulating layer. The insulating layer of the fine coaxial wire is formed by an electrodeposition process. The semiconductor device is formed by using the fine coaxial wire. <P>COPYRIGHT: (C)2008,JPO&INPIT |
