METHOD OF COATING A SUBSTRATE

摘要

The invention relates to a method of coating a substrate in a deposition chamber. The method comprising the steps of providing a source of at least one liquid precursor; atomizing the at least one liquid precursor into liquid droplets in the deposition chamber for producing aerosol; filling the deposition chamber with aerosol for forming saturated aerosol in the deposition chamber; and settling saturated aerosol by gravitation towards a surface of the substrate for coating the substrate in the deposition chamber.