发明名称 METHOD FOR ENHANCING PERFORMANCE OF PLASMA-WAVE TRANSISTOR
摘要 The method for enhancing the performance of a transistor may be provided that includes forming a nano-wire on a substrate, applying strain to the nano-wire to bend the nano-wire, forming a source electrode, a drain electrode and a gate electrode, and manufacturing a transistor including the bent nano-wire formed by the applying of the strain, and source electrode, drain electrode and gate electrode formed by the forming of the electrodes. Through the above configuration, a silicon device that operates in a terahertz band can be more easily manufactured, and it is possible to evaluate whether or not the silicon device operates as a plasma-wave transistor.
申请公布号 WO2016137030(A1) 申请公布日期 2016.09.01
申请号 WO2015KR01821 申请日期 2015.02.25
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY) 发明人 CHOI, Yang-Kyu;KIM, Kyung Rok;JEON, Chang-Hoon;MOON, Dong-Il
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
主权项
地址