| 摘要 |
PROBLEM TO BE SOLVED: To provide a hole inspection device and a hole inspection method which accurately determine a non-defective or defective state of a hole (particularly, screw hole), and can reduce erroneous determination.SOLUTION: A hole inspection device is provided with: a laser oscillator 11; a half mirror 12; a probe strut 2; a mirror 14 on the leading edge of the probe strut; a light-receiving element 13 provided on an extension line of an optical axis L of a laser beam connecting the mirror 14 and the half mirror 12; and an image sensor 15 arranged at a position separated from the optical axis L of the laser beam. The non-defective or defective state of the hole is primarily determined by analyzing intensity of light returned to the light-receiving element 13 from an inspection object portion T, in response to irradiation with the laser beam to the inspection object portion T in the hole. In addition, an uneven state of the inspection object portion is measured based on the position of the image of the inspection object portion T which has been formed on the image sensor 15. The hole inspection device finds erroneous determination of a non-defective or defective state of the hole by collating the result of the primary determination of the measurement result of the uneven state.SELECTED DRAWING: Figure 2 |
