| 摘要 |
PROBLEM TO BE SOLVED: To shorten time required for movement while simplifying movement control of an inspection probe.SOLUTION: First processing for specifying a first position (position P22) of a tip part of each connection terminal 22, second processing for specifying a second position located on the first direction side from the first position on an outer edge part of a land and third processing for specifying a third position displaced from the second position by a regulated distance in a second direction reverse to the first direction are executed. When probing position data is generated by using the third position as a probing position, a rectangular area Aa in which respective first positions are overlapped to the outer edge part is specified prior to the second processing and the rectangular area Aa is divided into four sections by broken lines La1, La2 to regulate areas Aaa to Aad. In the second processing, when the first position exists in the area Aaa e.g., a direction of an arrow A1 directed from a center P0 of the rectangular area Aa to an intermediate point Pa12 of vertices Pa1, Pa2 is set as a first direction. |
