| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique favorable for reducing vibration, noise and generation of particles incident to movement of a moving part, and for recovering the particles generated.SOLUTION: The drive unit having a moving part, and an actuator for driving the moving part includes a connection member arranged while being bent in U-shape so as to connect a first connector placed fixedly and a second connector secured to the moving part, a regulation part placed along the travel path of the moving part and having a regulation surface for regulating shape change of the connection member incident to movement of the moving part, and a vacuum suction part for causing mutual vacuum suction of a part of the connection member and the regulation part, and sucking particles from the space around the connection member and the regulation part. |
