| 主权项 |
1. A fabrication data collection system comprising:
a semiconductor tool data collection unit comprising: a data collector, a semiconductor fabrication tool, an energy monitor, and a fluid flow monitor; wherein the semiconductor fabrication tool includes sensors to output tool characteristics, and the tool characteristics output is communicated to the data collector; wherein the energy monitor outputs an amount of energy used by the semiconductor fabrication tool, and the energy monitor output is communicated to the data collector; wherein the fluid flow monitor outputs a fluid flow rate of the semiconductor fabrication tool, and the fluid flow rate output is communicated to the data collector; wherein the semiconductor tool data collection unit is configured to communicate the outputs to one more servers using a network switch, wherein the network switch is configured to receive a communication from one or more semiconductor tool data collection units; wherein the servers are configured to store the outputs and/or perform analysis on the one or more communications from the one or more semiconductor tool data collection units, and to connect to a public network through a secure firewall, such that one or more authorized users are remotely able to access information on the servers though the public network via the secure firewall. |
