| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To attain highly accurate laser beam machining by preventing deviation of an irradiation position of a laser beam caused by thermal deformation of a workpiece. <P>SOLUTION: An apparatus 20 for performing laser beam machining on a prescribed region by irradiating a plurality of positions of a workpiece 32 with a laser beam is provided with: a machining stage 25 for placing the workpiece 32 on; a machining stage driving means 26 for moving the machining stage 25 to the plurality of positions; a position detecting means 27 for detecting the positions of the machining stage 25; a thickness measuring means 29 for measuring the thickness of the workpiece 32; and a control means 31 that, on the basis of the machining conditions of the workpiece 32, picks up a specific correction pattern from those for a plurality of machining conditions which are preliminarily stored and that, by the correction pattern so picked up, controls to correct the irradiation positions of the laser beam. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
