| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a carbonaceous film on an insulator film such as a resin film without heating a target, and keeping transparency thereof. SOLUTION: A highly transparent diamond-like carbon film is formed by bringing mixed gas of carbon-containing gas and inert gas into a plasma state using a plasma generating part, extracting an ion beam from the plasma by an extraction electrode, accelerating the ion beam, and applying the ion beam to the target coated with silicon oxide so as to induce binding of carbon atoms and silicon oxide atoms. COPYRIGHT: (C)2009,JPO&INPIT
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