SYSTEM AND METHOD FOR LEARNING AND/OR OPTIMIZING MANUFACTURING PROCESSES

摘要

A system and method for learning and/or optimizing processes related to semiconductor manufacturing is provided. A learning component generates a set of candidate process models based on process data associated with one or more fabrication tools. The learning component also selects a particular process model from the set of candidate process models that is associated with lowest error. An optimization component generates a set of candidate solutions associated with the particular process model. The optimization component also selects a particular solution from the set of candidate solutions based on a target output value and an output value associated with the particular solution.

主权项

1. A system, comprising:
a memory storing computer executable components; and a processor configured to execute the following computer executable components stored in the memory:
a learning component that generates a set of candidate process models based on process data associated with one or more fabrication tools and selects a particular process model from the set of candidate process models based on a first defined criterion; andan optimization component that generates a set of candidate solutions associated with the particular process model and selects a particular solution from the set of candidate solutions based on a second defined criterion.