发明名称 MANUFACTURING METHOD FOR VAPOR DEPOSITION MASK
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a vapor deposition mask having a through hole formed to have a complex shape, by making use of a plating treatment.SOLUTION: A vapor deposition mask manufacturing method comprises: a preparing step of preparing a substrate having a surface defined into a plurality of high adhesion regions and a low adhesion region enclosing the high adhesion regions; a plating resist forming step of forming a plating resist pattern through a predetermined clearance over the surface of the substrate; and a plating treatment step of precipitating a metal layer on the surface of the substrate in the clearance of the plating resist pattern. The plating resist forming step is executed so that the plating resist pattern may cover the high adhesion regions and may extend to the low adhesion region and so that the clearance of the plating resist pattern may be positioned over the low adhesion region. At the plating treatment step, therefore, a plating solution is enabled to immerse partially between the low adhesion region and the plating resist pattern.SELECTED DRAWING: Figure 11
申请公布号 JP2016199775(A) 申请公布日期 2016.12.01
申请号 JP20150078522 申请日期 2015.04.07
申请人 DAINIPPON PRINTING CO LTD 发明人 IKENAGA CHIKAO
分类号 C23C14/04;C25D1/10;C25D5/02;G03F7/40;H01L51/50;H05B33/10 主分类号 C23C14/04
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