MULTIWAVELENGTH LASER LIGHT SOURCE AND INDUCTIVE EMISSION SUPPRESSION MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a small-sized multiwavelength laser light source capable of outputting laser lights of different two or more wavelengths while easily matching optical axes, and an inductive emission suppression microscope.SOLUTION: The inductive emission suppression microscope comprises: an objective lens 60 to which two or more laser lights emitted from the multiwavelength laser light source are incident and which irradiates an object to be measured with the laser lights of the wavelengths; and a camera for monitoring a laser light that is outputted from the object to be measured by radiating the laser lights. A diffraction grating layer 6 of the multiwavelength laser light source includes a first diffraction grating region and a second diffraction grating region.SELECTED DRAWING: Figure 1