LIGHT EMISSION PREVENTION USING MULTI-LAYER CERAMIC FABRICATION TECHNIQUES

摘要

PROBLEM TO BE SOLVED: To prevent formation of unwanted light emission in a gas flow path in an electrostatic chuck.SOLUTION: An electrostatic chuck apparatus for a wafer 102 includes ceramic 104 comprising multiple layers with cutouts 107 that form a labyrinth structure which defines a path for a cooling or heating gas from a tube 106. The structure prevents particles from acceleration causing formation of unwanted light emission in the gas flow path.SELECTED DRAWING: Figure 1