| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a hydrogen gas concentration sensor capable of keeping a wide measuring range with high measurement accuracy, and to provide a hydrogen gas concentration measuring instrument. <P>SOLUTION: The hydrogen gas concentration sensor has a substrate and a plurality of hydrogen detecting films formed so as to be adjacent to the substrate. Each of a plurality of the hydrogen detection films has a thin-film layer and the catalyst layer formed on the surface of the thin-film layer. Each of the catalyst layers is constituted so as to reversibly make the thin-film layer hydrogenate, by photocatalytic action upon being in contact with hydrogen gas to reversibly change the electrical resistance value. Each of the thin-film layers is different in the sensitivity of change in the hydrogen gas concentration and the resistance value change and hydrogen gas concentration measurement range. Accordingly, in the hydrogen gas concentration sensor and the hydrogen gas concentration measuring instrument, the concentration of the hydrogen gas can be measured with high accuracy over a wide range by the thin layer of high sensitivity, when the hydrogen gas concentration is low and can be measured over a wide range with high accuracy by the thin-film layer wide in measuring range, when the hydrogen gas concentration is high. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
