发明名称 METHOD OF MEASURING EDGE OF TESTING OBJECT AND METHOD OF ELECTRICAL TESTING USING THE METHOD
摘要 An edge measurement method of a test material and an electricity test method using the same are provided to improve the correct recognition rate of a wafer by removing noise with a digital image processing as a software method. An electricity test method comprises: a step for obtaining a first video data by scanning the image of objects for an electricity test(S210); a step for obtaining a second video data in which noise is removed by filtering the first video data; a step for setting up the edge region of the objects as a coordinate standard value to the second video data; a step for obtaining the coordinate of an electricity test domain of the objects by utilizing the coordinate standard value; and a step for arranging a device for an electrical test and inspecting the objects by using the barycentric coordinates of the objects(S270).
申请公布号 KR20080111579(A) 申请公布日期 2008.12.24
申请号 KR20070059695 申请日期 2007.06.19
申请人 SECRON CO., LTD. 发明人 KWUN, DUCK SUNG
分类号 H01L21/66 主分类号 H01L21/66
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