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发明名称
Verfahren zum selektiven Verbinden von Substraten
摘要
申请公布号
DE10239306(B4)
申请公布日期
2006.08.31
申请号
DE20021039306
申请日期
2002.08.27
申请人
HAHN-SCHICKARD-GESELLSCHAFT FUER ANGEWANDTE FORSCHUNG E.V.;HYGRAMA AG
发明人
SCHAIBLE, JOCHEN;NOMMENSEN, PETER;AUBER, JOHANNES
分类号
B81C3/00;B81B3/00;F15C5/00;F16K99/00;H01L21/20;H01L21/30
主分类号
B81C3/00
代理机构
代理人
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