发明名称 Method for manufacturing surface acoustic wave device
摘要 A surface acoustic wave device is disclosed, which comprises a surface acoustic wave element including a lithium tantalate piezoelectric substrate 10 with one principal surface thereof formed with an IDT electrode 11 , a connector electrode 12 and a periphery sealing electrode 13 , and a base substrate 2 formed with an electrode 21 for connection to the element connected to the connector electrode 12 through a solder bump component 3 and a periphery sealing conductor film 22 joined to the periphery sealing electrode 13 thorough a solder sealing component 4 . For the solder bump component 3 and the solder sealing component 4 , a Sn-Sb based or Sn-Ag based lead-free solder containing 90% or more Sn is used, and the thermal expansion coefficient of the base substrate 2 is set in the range of 9-20 pm/° C. The joining is accomplished with high stability resisting thermal stress due to a difference in thermal expansion coefficient, so that a surface acoustic wave device that can maintain stable connection for a long duration of time can be provided.
申请公布号 US2006220500(A1) 申请公布日期 2006.10.05
申请号 US20060445586 申请日期 2006.06.01
申请人 KYOCERA CORPORATION 发明人 SHIMADA MITSUTAKA;YAMAGATA YOSHIFUMI;OTSUKA KAZUHIRO;HISATAKA MASAFUMI;OIKAWA AKIRA;KUWAHATA MICHIHIKO;YAMANO MASARU
分类号 H03H9/25;G01H3/12;H01L21/56;H01L21/60;H01L23/31;H01L27/14;H03H3/08;H03H9/10 主分类号 H03H9/25
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