发明名称 |
METHOD OF FORMING A FLAT MEDIA TABLE FOR PROBE STORAGE DEVICE |
摘要 |
A method of forming a flat media table for a probe-based storage device includes applying a first-photo-resistive coating to one side of a silicon wafer and a second photo-resistive coating to an opposite side of the silicon wafer. The silicon wafer includes a table layer, a suspension layer and a spacer layer sandwiched therebetween. The first photoresistive coating is applied to the table layer and the second photoresistive coating is applied to the suspension layer. A first pattern is formed through photolithography in the second photoresistive coating and etched into the suspension layer. A second pattern is formed through photolithography in the first photoresistive coating and etched into the table layer. A portion of the table layer is released from the suspension layer though selective etching of the spacer layer so as to form a plurality of stand-offs defined by remaining portions of the spacer layer.
|
申请公布号 |
US2009155727(A1) |
申请公布日期 |
2009.06.18 |
申请号 |
US20070955538 |
申请日期 |
2007.12.13 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
DRECHSLER UTE;LANTZ MARK A.;ROTHUIZEN HUGO E. |
分类号 |
G03F7/00 |
主分类号 |
G03F7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|