| 摘要 |
This plasma treatment device, which performs plasma treatment on a body to be treated, comprises a treatment container for housing the body to be treated, a dielectric window provided so as to seal the open portion in the upper portion of the treatment container and allowing microwaves to pass through to the interior of the treatment container, and a slot plate which is provided above the dielectric window and has formed therein a plurality of slots for irradiating the microwave onto the dielectric window. On the lower surface of the dielectric window, protruding portions, which protrude downward from the lower surface, are provided at positions corresponding to the slots. With respect to the microwave wavelength λ, the width of each of the protruding portions is λ/4 ± λ/8. |
