QUANTITATIVE X-RAY ANALYSIS AND RATIO CORRECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for performing correction of X-ray intensity in X-ray diffraction in transmission geometry without explicit knowledge of the thickness of a sample.SOLUTION: A method comprises: taking an X-ray diffraction measurement in transmission by directing X-rays onto a sample surface at an incident angle ψ1 and measuring intensity Id(θd) of the diffracted X-rays with an X-ray detector at an exit angle ψ2 to the sample surface, the difference 2θd between the incident angle and the exit angle corresponding to an X-ray diffraction peak of a predetermined component; taking a correction measurement of X-rays by measuring the background intensity Id(θbg) of X-rays, with a difference 2θbg between the incident angle and the exit angle deviating by 0.2 to 5° from 2θd; and calculating the quantity of the predetermined component from the intensity ratio of the diffraction intensity and the background intensity.SELECTED DRAWING: Figure 4