| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak inspection device and leak inspection method capable of appropriately scavenging the inside of a duct having a dead end at a pressure gauge or the like.SOLUTION: A first scavenging port 33a is disposed in the immediate vicinity of a first detection hole 47a of a differential pressure sensor 47 in a first branch pipe 33 that extends from a gas introduction portion 10 to the first detection hole 47a. A second scavenging port 34a is disposed in the immediate vicinity of a second detection hole 47b of the differential pressure sensor 47 in a second branch pipe 34 that extends from the gas introduction portion 10 to the second detection hole 47b. When a first on-off valve 43 is opened and the inside of each duct in a measurement system is scavenged with the gas coming from an air tank 18, both the first scavenging port 33a and second scavenging port 34a are opened to the atmosphere by opening a main scavenging valve 51, a first sub scavenging valve 52, and a second sub scavenging valve 53.SELECTED DRAWING: Figure 1 |
