| 摘要 |
PROBLEM TO BE SOLVED: To recover mist containing powdery flowing chips floating in a chamber, and to prevent sticking/accumulation of the powdery flowing chips by arranging a liquid injection means as a recovering mechanism at least in one of the wall part or the ceiling part in a processing chamber, and showering the whole inside of the processing chamber. SOLUTION: Powdery flowing chips generated by pulverization of glass beads float in a casing 14, and are discharged by driving a liquid injection means 200 constituting a recovering means 26. The liquid injection means 200 is arranged on the ceiling part 14c side of the casing 14, and has four water injection nozzles 202a to 202d to inject water 18 at a wide angle in a chamber 14a in the casing 14 through the water injection nozzles 202a to 202d to forcedly discharge the powdery flowing chips floating in the chamber 14a and the powdery flowing chips sticking to the arm part 102 to the bottom 14d side of the casing 14 to thereby effectively avoid sticking/accumulation of the powdery flowing chips as well as to prevent the powdery flowing chips from leaking outside by opening/closing of a door.
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