SISTEMA E METODO PER GESTIRE AUTOMATICAMENTE BAIE DI PRODUZIONE DI SEMICONDUTTORI

摘要

A semiconductor production system includes a plurality of process equipments 700, each for processing a lot representing a predetermined number of semiconductor wafers and generating real-time process data associated with the process performed on each lot; at least one production management device 100 for generating control commands associated with the process and the transport of lots to and from and within the semiconductor production bays and receiving the real-time process data from said each process equipments; an equipment control device 600 for controlling said process equipments in response to the control commands and transmitting the real-time process data to said production management device; a data storing device 200, 300, 500 for storing data associated with process and the lot in the semiconductor production; and a history management device 400 for managing history data of each of said process equipments and semiconductor wafers. The history database 500 is updated from a real-time database 200 via a temporary storage unit 300 at timed intervals or at the end of each process. Reports on the process can be produced from the history database by means of a reporting device 900.