发明名称 SPECTRAL SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a spectral system which can perform spectral intensity correction for an optical system, using a calibrating light source. SOLUTION: The spectral system comprises a microscope 220, a confocal unit 230, and a spectral device 240. The microscope 220 includes a wavelength calibration light source section 225 which is placed on an optical system, which is coaxial with an objective 221 of the microscope 220 and allows wavelength calibration beam to be made incident on the objective 221. In the wavelength calibration light source section 225, a light source drive circuit 2255 applies a fixed voltage to a wavelength calibration light source 2251 to make it light. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006153765(A) 申请公布日期 2006.06.15
申请号 JP20040347673 申请日期 2004.11.30
申请人 NIKON CORP 发明人 SASE ICHIRO;AIKAWA NAOSHI
分类号 G01J3/02;G01N21/64 主分类号 G01J3/02
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