| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method, a production device and a washing device of gas dissolution washing water, suitably used for washing an electronic component, etc. requiring high cleanliness factor, by which gas dissolution washing water of desired gas concentration is produced safely without using a pressure reducing mechanism such as a vacuum pump, etc., while water and a specified gas of the used gas dissolution washing water can be reused. SOLUTION: In the production method for gas dissolution washing water provided by dissolving the specified gas in water, the specified gas is dissolved in water under a pressure exceeding the atmospheric pressure to provide a gas dissolution water of a concentration exceeding the solubility under atmospheric pressure, and then the gas dissolution water is decompressed to remove a part of a dissolved gas. This invention further provides the production device of gas dissolution washing water having a gas dissolution device for dissolving the specified gas in the water under the pressure exceeding the atmospheric pressure and a gas part removing device which decompresses the gas dissolution water from the gas dissolution device to a pressure lower than the pressure at gas dissolving to remove a part of the dissolved gas, and the washing device using the gas dissolution washing water. COPYRIGHT: (C)2007,JPO&INPIT
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