| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray spectroscope capable of adjusting a shield plate certainly and correctly. SOLUTION: This is an X-ray spectroscope 3 mounted on an electron microscope in which characteristic X-rays generated from a test piece is introduced into a diffraction grating 7 and by detecting the intensity of the X-rays dispersed in the diffraction grating 7, X-ray analysis is carried out. The X-ray spectroscope 3 is provided with a zero-order light shield plate 13 to shield zero-order light X-rays 12 out of the spectral X-rays incident into the X-ray spectroscope 3, a movement mechanism to move the zero-order light shield plate 13 in the X-ray spectrum direction of an X-ray detector 5, and a holding means to hold the vacuum state of the X-ray spectroscope in the movement mechanism. COPYRIGHT: (C)2008,JPO&INPIT
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