发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
A semiconductor device includes a semiconductor substrate having a first conductivity type, an epitaxial layer having a second conductivity type, an isolation area in the epitaxial layer to define an active area of the semiconductor substrate, a body area having a first conductivity type and a drift area having a second conductivity type adjacent to each other in the epitaxial layer, a LOCOS insulating layer in the drift area and surrounded by the drift area, a drain area adjacent to a side part of the LOCOS insulating layer and surrounded by the drift area, a body contact area and a source area in the body area and surrounded by the body area, and a gate area overlapping the drift area and a part of the LOCOS insulating layer from a direction of the body area. |
申请公布号 |
US2016172486(A1) |
申请公布日期 |
2016.06.16 |
申请号 |
US201514964758 |
申请日期 |
2015.12.10 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM Minhwan;JUNG Jaehyun;KIM Jungkyung;LEE Kyuok;JANG Jaejune;JEON Changki;CHO Suyeon;KO Seonghoon;CHO Kyu-Heon |
分类号 |
H01L29/78;H01L29/423;H01L29/08;H01L29/06;H01L29/10 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
1. A semiconductor device, comprising:
a semiconductor substrate having a first conductivity type; an epitaxial layer having a second conductivity type on the semiconductor substrate; an isolation area in the epitaxial layer to define an active area of the semiconductor substrate; a body area having a first conductivity type and a drift area having a second conductivity type, the body area and the drift area being adjacent to each other in the epitaxial layer; a local oxidation of silicon (LOCOS) insulating layer in the drift area, side and lower surfaces of the LOCOS insulating layer being surrounded by the drift area; a drain area adjacent to a side part of the LOCOS insulating layer, side and lower surfaces of the drain area being surrounded by the drift area; a body contact area and a source area in the body area, side and lower surfaces of the body contact area and the source area being surrounded by the body area; and a gate area overlapping the drift area and a part of the LOCOS insulating layer from a direction of the body area. |
地址 |
Suwon-si KR |