发明名称 PRESSURIZING-TYPE LAMP ANNEALING DEVICE, FERROELECTRIC FILM AND METHOD FOR PRODUCING SAME
摘要 [Problem] The present invention addresses the problem of providing a method for producing a ferroelectric film from a lead-free material, said ferroelectric film having a perovskite structure that ferroelectric films produced by conventional methods have not been able to have. [Solution] One embodiment of the present invention is a ferroelectric film that is an ABO3 film having a perovskite structure, wherein A represents at least one element selected from the group consisting of alkali metals, alkaline earth metals, Ag, Bi and group 3 elements excluding Sc, and B represents at least one element selected from the group consisting of Mg, Sc, group 4-6 elements, Mn, Fe, Co, Ni, Cu, Zn, B, Al, Ga, Si, Ge, Sn, P, As, Sb and S. This ferroelectric film is formed by a sol-gel method and is crystallized by means of firing at a pressure of from 1 MPa to 20 MPa (inclusive).
申请公布号 WO2016121204(A1) 申请公布日期 2016.08.04
申请号 WO2015JP82488 申请日期 2015.11.19
申请人 YOUTEC CO., LTD. 发明人 KIJIMA TAKESHI;HAMADA YASUAKI;USHIROYAMA TOMOYUKI
分类号 H01L41/187;C01G25/00;H01L21/26;H01L21/316;H01L41/318;H01L41/319;H01L41/43 主分类号 H01L41/187
代理机构 代理人
主权项
地址