METHOD FOR OBTAINING A WAVY LAYER LOCALLY SUSPENDED ON A SUBSTRATE USING A DEFORMATION BY FORMATION OF WRINKLES

摘要

A pressure-sensitive sensor including a substrate supporting a piezoelectric layer of a piezoelectric material. The piezoelectric layer includes surface undulations as wrinkles on which pressure is exerted upon use of the sensor. The piezoelectric layer is sandwiched between two electrodes for collecting charges generated by deformation of the piezoelectric layer.